| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment device and a manufacturing apparatus for a display device capable of improving working efficiency by increasing the number of products to be treated per hour. SOLUTION: The manufacturing apparatus 30 includes a reversing chamber 32, a getter chamber 34, an adherent adsorbing chamber 36 and a sealing chamber 38 as treatment chambers for performing specific treatment, and comprises a moving mechanism 42 that moves among the chambers 32, 34, 36, 38 one by one, and a returning mechanism 3 for returning an electrostatic chuck discharged from the sealing chamber 38 to the reversing chamber 32. The apparatus 30 further comprises a vacuum pump PP for evacuating the chambers 32, 34, 36, 38 independently of each other, and shutters 33, 35, 37 for selectively partitioning the chambers. As a result, a plurality of electrostatic chucks circulate among the chambers 32, 34, 36, 38 to allow a plurality of front substrates 10 and back substrates 12 to receive different treatments at the same time in the apparatus 30. COPYRIGHT: (C)2006,JPO&NCIPI
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