MULTI ELEMENT TOOL DESIGNS FOR MODIFYING SURFACE CHARACTERISTICS ON SUBSTRATES

摘要

There is provided an assembly for modifying a surface of a workpiece, where the assembly is responsive to a plurality of control signals. The assembly includes a plurality of tools and a plurality of displacement mechanisms. The plurality of tools are configured to modify the surface of the workpiece. The plurality of displacement mechanisms are each arranged to displace a respective one of the tools along a substantially same path on the workpiece in response to at least one of the control signals.