Droplet-discharging head, method for manufacturing the same, and droplet-discharging device

摘要

A droplet-discharging head (1) comprises: a nozzle substrate (5) in which a plurality of nozzle holes (16) for discharging droplets are formed; a cavity substrate (3) in which a recess (6) to serve as a discharging chamber (12) for pooling the droplets is formed, the recess having a diaphragm (11) formed in a bottom face thereof; an electrode substrate (2) in which an individual electrode (7) opposite to the diaphragm (11) for driving the diaphragm is formed; and a reservoir substrate (4) having a recess to serve as a common droplet chamber (13) for supplying droplets to the discharging chamber (12), a penetrating hole (14) for transporting droplets to the discharging chamber (12) from the common droplet chamber (13), and a nozzle communicating hole (15) for transporting droplets to the nozzle hole (16) from the discharging chamber (12), wherein the reservoir substrate (4) has the nozzle substrate (5) bonded to one face thereof and has the cavity substrate (3) bonded to the other face thereof.