BALANCED POSITIONING SYSTEM FOR USE IN LITHOGRAPHIC APPARATUS,申请号KR20000078676-传众专利搜索

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发明名称	BALANCED POSITIONING SYSTEM FOR USE IN LITHOGRAPHIC APPARATUS
摘要
申请公布号	KR100570252(B1)	申请公布日期	2006.04.12
申请号	KR20000078676	申请日期	2000.12.19
申请人		发明人
分类号	G03F7/22;F16F15/02;G03F7/20;G03F9/00;H01L21/027;H01L21/68;H05K3/00	主分类号	G03F7/22
代理机构		代理人
主权项
地址

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