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发明名称
METHOD FOR IMPLANTATION THROUGH AN IRREGULAR SURFACE
摘要
申请公布号
EP1644969(A1)
申请公布日期
2006.04.12
申请号
EP20040767657
申请日期
2004.07.12
申请人
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
GHYSELEN, BRUNO;AKATSU, TAKESHI;FONTANIERE, RICHARD
分类号
H01L21/265;H01L21/762;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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