摘要 |
PROBLEM TO BE SOLVED In a surface processing apparatus for spraying a processing gas onto the surface of an object to be processed through a hole-row such as a slit, the surface of the object having a large area can effectively be processed even if the hole-row is short. MEANS FOR SOLVING A plurality of electrode plates 11, 12 are arranged, in side-by-side relation, on a processor 1 of a plasma surface processing apparatus M. A slit-like hole-row 10a is formed between the adjacent electrode plates, and a hole-row group 100 is constituted by the side-by-side arranged hole-rows 10a. The object W is moved along the extending direction of each slit 10a by a moving mechanism 4. |
申请人 |
SEKISUI CHEMICAL CO., LTD. |
发明人 |
ANZAI, JUNICHIRO;NAKANO, YOSHINORI;KAWASAKI, SHINICHI;NAKATAKE, SUMIO;MAYUMI, SATOSHI;MIYAMOTO, EIJI;TAKEUCHI, TOSHIMASA |