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经营范围
发明名称
METHODS OF REMOVING PHOTORESIST FROM SUBSTRATES
摘要
申请公布号
EP1644776(A2)
申请公布日期
2006.04.12
申请号
EP20040776596
申请日期
2004.06.15
申请人
LAM RESEARCH CORPORATION
发明人
EDELBERG, ERIK, A.;CHEBI, ROBERT, P.;LOW, GLADYS, SOWAN
分类号
G03F7/42;H01L21/311;(IPC1-7):G03F7/00
主分类号
G03F7/42
代理机构
代理人
主权项
地址
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