| 摘要 |
The invention proposes sensor elements (5) for detecting a physical measurement variable such as a pressure, a temperature, a gap width, or a capacitance between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress. In certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10), a sensitive layer (13, 30), in particular a sensor segment (13), is provided, which is separated from the body (10) by an insulation layer (12) and has a covering layer (14) in a first embodiment. In an alternative embodiment, a surface region of at least one of the two bodies (10) has a recess (23) in which the sensor surface (13) is disposed on the insulation layer (12). In a third embodiment, the sensor surface (13) has a length of 10 mum to 5 mm, a width of less than 5 mum, and a thickness of less than 200 nm. |
