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发明名称
WAFER CARRIER
摘要
申请公布号
KR20060031226(A)
申请公布日期
2006.04.12
申请号
KR20040080176
申请日期
2004.10.08
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KANG, SUN JIN;LEE, SANG KIL;YOU, DONG NAM
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
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地址
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