| 摘要 |
PURPOSE: To lengthen the time capable of continuous automatic operation, in a semiconductor substrate machining installation wherein a transfer stand for transferring semiconductor substrates in a magazine for carriage to a magazine for equipment is installed in a load part, and an unload part for returning the substrates to the magazine for carriage is installed. CONSTITUTION: A stock stand 7 for loading a plurality of magazines for carriage is installed. A transferring mechanism 10 which transfers the magazines for carriage from the stock stand to a transferring stand, from it to an unload part, and from it to the stock stand is installed. |
