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经营范围
发明名称
Semiconductor to keep gradation uniformly after CMP and its manufacturing method
摘要
申请公布号
KR100570233(B1)
申请公布日期
2006.04.11
申请号
KR20030006470
申请日期
2003.01.30
申请人
发明人
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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