发明名称 |
Electric heater for a semiconductor processing apparatus |
摘要 |
An electric heater has multiple zones, wherein the multiple zones include at least one zone which is subject to high loading (e.g. bottom zone) and, at least one zone is a non-metal heating element, and the rest of the zones (e.g. middle zone and top zone) are metal resistance heating elements of light gauge overbent.
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申请公布号 |
US7027722(B2) |
申请公布日期 |
2006.04.11 |
申请号 |
US20040503138 |
申请日期 |
2004.08.11 |
申请人 |
KOYO THERMO SYSTEMS CO., LTD. |
发明人 |
UEMORI SUSUMU;AITANI TAKASHI |
分类号 |
F26B19/00;H01L21/00;H01L21/205;H01L21/22 |
主分类号 |
F26B19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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