DEVICE FOR FIXING LOWER MEMBERS AND FLUID CONTROL APPARATUS INCORPORATING SAME

摘要

Lower members each have a bolt bore comprising a large-diameter portion larger than the head of a bolt in diameter, and a small diameter portion extending downward from the large-diameter portion with a stepped portion formed therebetween and having a diameter intermediate between the diameter of the bolt head and the diameter of the shank of the bolt. The small-diameter portion of the bolt bare has fitted therein a hollow cylindrical spacer with an inside diameter larger than the diameter of the bolt shank. The spacer has a lower end supported by a support member and an upper end positioned in the large-diameter portion. A hollow cylindrical elastic member is interposed between the bolt head and the stepped portion for biasing the lower member toward the support member.