发明名称 |
Optical modulation element and projection apparatus |
摘要 |
An optical modulation element is capable of forming a reflective diffraction grating in which heights of a plurality of elements each having a reflecting surface periodically change. The reflecting surfaces of at least one of the plurality of elements are driven in a direction of height by piezoelectric elements. The plurality of elements each having the surface as the reflecting surface are two-dimensionally arrayed by juxtaposing long sides. A rear surface side of an effective reflecting portion of each of the elements is fixed to the piezoelectric element.
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申请公布号 |
US7027201(B2) |
申请公布日期 |
2006.04.11 |
申请号 |
US20010841282 |
申请日期 |
2001.04.24 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
MOCHIZUKI NORITAKA |
分类号 |
G02B26/06;G02F1/09;G02B26/00;G02B26/08;G02B27/18;G03B21/00;H04N5/74 |
主分类号 |
G02B26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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