发明名称 Optical modulation element and projection apparatus
摘要 An optical modulation element is capable of forming a reflective diffraction grating in which heights of a plurality of elements each having a reflecting surface periodically change. The reflecting surfaces of at least one of the plurality of elements are driven in a direction of height by piezoelectric elements. The plurality of elements each having the surface as the reflecting surface are two-dimensionally arrayed by juxtaposing long sides. A rear surface side of an effective reflecting portion of each of the elements is fixed to the piezoelectric element.
申请公布号 US7027201(B2) 申请公布日期 2006.04.11
申请号 US20010841282 申请日期 2001.04.24
申请人 CANON KABUSHIKI KAISHA 发明人 MOCHIZUKI NORITAKA
分类号 G02B26/06;G02F1/09;G02B26/00;G02B26/08;G02B27/18;G03B21/00;H04N5/74 主分类号 G02B26/06
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