发明名称 |
Evaluation of chamber components having textured coatings |
摘要 |
A component for a substrate processing chamber comprises a structure having a textured coating with surface grains. The component is evaluated by directing a beam of electrons onto the textured coating of the component to cause at least some of the electrons to be backscattered. The backscattered electrons are detected and a signal image is generated. The component is selected when the signal image exhibits surface grains sized from about 0.1 to about 5 micron. In one version, the component is also selected when the grains are substantially flower shaped.
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申请公布号 |
US7026009(B2) |
申请公布日期 |
2006.04.11 |
申请号 |
US20020113847 |
申请日期 |
2002.03.27 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LIN SHYH-NUNG;MENZIE MARK D.;SUN NIMOAL |
分类号 |
B05D1/02;G01B15/04;B05D1/08;C23C4/08;C23C4/10;C23C4/12;C23C14/00;C23C14/56;C23C16/44;G01B15/08;G01N23/20;G01N23/203;H05H1/46 |
主分类号 |
B05D1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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