发明名称 Method and apparatus to reduce parasitic forces in electro-mechanical systems
摘要 An electro-mechanical system, the system comprising a first surface with an electrically activated electrode coupled to the first surface and to an electrical source to receive a first signal. The system further comprising a moveable structure suspended at a first height over the first surface, the moveable structure being attracted toward the electrode based upon the first signal, and the moveable structure being attracted toward the first surface through an interaction with one or more parasitic forces. The systems also provides a landing post coupled to the moveable structure, the landing post being adapted to contact the base of the landing post against the first surface when the electrically activated electrode receives a predetermined voltage bias associated with the first signal, thereby maintaining an outer portion of the moveable structure free from physical contact with the first surface and reducing a magnitude of one or more parasitic forces.
申请公布号 US7026695(B2) 申请公布日期 2006.04.11
申请号 US20030718482 申请日期 2003.11.19
申请人 MIRADIA INC. 发明人 YANG XIAO;ZHANG SHOUCHENG;CHEN DONGMIN;CHEN JIE
分类号 H01L27/14;B81B3/00;G02B26/08;H01L21/00;H01L29/82 主分类号 H01L27/14
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