ANISOTROPIC CONDUCTIVE CONNECTOR AND CIRCUIT DEVICE INSPECTION METHOD

摘要

There are provided an anisotropic conductive connector having preferable resistance for repeated use in inspection of a circuit device such as a semiconductor integrated circuit having a solder-salient electrode and a circuit device inspection method having a preferable inspection efficiency. Lubricant is applied to the surface of the anisotropic conductive connector. An inspection circuit substrate is electrically connected to a circuit device to be inspected, by using the anisotropic conductive connector having a surface of at least the contact side with the circuit device to be inspected, to which lubricant is applied before performing inspection of the circuit device.