| 摘要 |
PROBLEM TO BE SOLVED: To obtain an automatic update function of a pattern output table showing sufficient temperature responsibility, and to suppress the deterioration of temperature responsibility without bothering a maintenance person. SOLUTION: An apparatus is provided with a control unit 1 changing a control amount by an object of control by changing a manipulated variable inputted to the object of temperature control, performing an operation based on the changed control amount, controlling the manipulated variable and maintaining the control amount to a target value or making it follow the target value; a pattern generator 2 for previously setting an output control pattern, and outputting the manipulated variable based on the output control pattern; and a switch 3 changing over the control unit and the pattern generator, calculating a deviation value between the output result of the pattern generator and the target value, and changing switching timing in accordance with the deviation value. COPYRIGHT: (C)2006,JPO&NCIPI
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