| 摘要 |
PROBLEM TO BE SOLVED: To measure the shapes of uneven objects under measurement with high accuracy. SOLUTION: This optical measurement instrument is equipped with: a plurality of measurement parts 101 to 103 and a control part 104. The measurement parts 101 to 103 comprise light sources 105, 107, and 109 for outputting light for measurement, and light detection parts 106, 108, and 110 for detecting the light for measurement reflected by the objects 114 and 115 under measurement. The control part 104 calculates the shapes of the objects 114 and 115 based on the light for measurement detected by the plurality of measurement parts 101 to 103. The optical axes of the light for measurement outputted from the light sources 105, 107, and 109 of the respective measurement parts 101 to 103, are kept from crossing each other while the respective light sources 105, 107, and 109 output the light for measurement so that it passes through a common area 113 in a prescribed domain. COPYRIGHT: (C)2006,JPO&NCIPI
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