发明名称 CHARGE STORAGE TARGET AND DEVICES
摘要 1285050 Image pick up tubes; semi-conductor devices RCA CORPORATION 1 Dec 1969 [29 Nov 1968] 58492/69 Headings HID and H1K A charge storage target comprises a semiconductor wafer 20 of one conductivity, an array of discrete regions 22 in the wafer of a second conductivity and, covering the wafer surface between the regions, a layer of insulating material 24 containing an excess concentration of non-mobile ions. The ions counter-act the effects in the wafer of an electrostatic field resulting from charge formed on the insulating surface by reading means. A Si photodiode target for a vidicon tube comprises a monocrystalline P doped N-type bulk region 20, an array of B doped P-type regions 22 and an insulating layer 24 of SiO 2 having an excess of positive oxide ions 25 formed by baking the target in oxygen during the diffusion of B to form the regions 22. If used in the secondary emission mode an excess of negative non-mobile ions is provided. The layer 24 may be Al 2 O 3 or Si 3 N 4 but it is not continuous. Specification 1,285,049 is referred to.
申请公布号 GB1285050(A) 申请公布日期 1972.08.09
申请号 GB19690058492 申请日期 1969.12.01
申请人 RCA CORPORATION 发明人 FREDERIC PAUL HEIMAN
分类号 H01J29/45;H01L23/29;H01L27/00;H01L31/00 主分类号 H01J29/45
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