METHODS FOR VISUALLY INSPECTING INTERFEROMETRIC MODULATORS FOR DEFECTS

摘要

A method is provided for visual inspection of an array (60) of interferometric modulators in various driven states. This method may include driving multiple columns or rows of interferometric modulators via a single test pad or test lead, such as test pad (72), and then observing the array (60) for discrepancies between the expected optical output and the actual optical output of the array (60). This method may particularly include, for example, driving a set of non-adjacent rows or columns, such as columns (62), to a state different from the intervening rows or columns, such as columns (64), and then observing the optical output of the array (60).