TWO DIMENSIONAL MICRO SCANNER

摘要

A two dimensional scanner comprising a first mirror (1) rotatable around a first axis (4), and a second mirror (2) rotatable around a second axis (5), said first and second reflective surfaces being formed on the same substrate (3), with their axis of rotation (4, 5) being non parallel in a. common plane, and a reflective surface (6) arranged such that a light beam reflected by said first mirror (1) is subsequently reflected by said surface (6) and finally by said second mirror (2). According to the invention, the first mirror is thus capable of scanning said light beam in a first direction and said second mirror is capable of scanning said light beam in a second direction. The result is a very compact two dimensional scanner, where the two individual mirrors are independent of each other, but still can be provided very close together, eliminating, or at least reducing distortion of the image.