| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser-induced modification apparatus and method which can improve a machining quality and a modification quality by preventing occurrence of cracks, rough surface, peeling and bulging caused by thermal shock. <P>SOLUTION: The laser-induced modification apparatus is characterized in that it is equipped with a laser generator 1 which generates a ultra short pulse laser having a pulse width of 10 fs-50 ps and laser irradiation means 1, 2, 5 which irradiate a workpiece with the ultra short pulse laser from the laser generator at a fluence not less than the threshold for reforming the workpiece, wherein the the ultra short pulse laser has a pedestal component in the range of 5-50% of the energy of the ultra short pulse laser. Irradiating the workpiece with the ultra short pulse laser having the pedestal component adds a pre- and/or a post-thermal treatment by a sub-pulse before and after an adiabatic machining with the main pulse, thereby relaxing/restoring the main pulse-caused thermal shock effects (cracks, rough surface, peeling, rising, etc.) and enabling the machining/reforming quality to be improved. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
