| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro valve capable of easily improving accuracy in flow rate of fluid flowing at an outflow port. SOLUTION: This micro valve comprises a valve seat formation base 10 formed by using a first silicon base, having the fluid outflow port 12 penetrated in the thickness direction, and provided with a valve seat 13 projected at a circumferential part of the outflow port 12 at one surface side, a valve element formation base 20 formed by using a second silicon base, having a valve element 23 for opening and closing the outflow port 12, and fixed to an upper surface side of the valve seat formation base 10, and an actuator formation base 30 for a micro-actuator driving the valve element 23. An inflow port 11 communicated with a fluid flow channel formed between the valve seat formation base 10 and the valve element formation base 20, is formed on the valve seat formation base 10 in a state of being penetrated in the thickness direction, and a structural parameter of the inflow port 11 and the outflow port 12 is determined to satisfy the relationship of (pressure loss of inflow port 11) > (pressure loss of outflow port 12). COPYRIGHT: (C)2006,JPO&NCIPI
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