发明名称 |
COMPUTER-IMPLEMENTED DATA PRESENTATION TECHNIQUES FOR A PLASMA PROCESSING SYSTEM |
摘要 |
<p>A computer-implemented data presentation technique for presenting a set of expected failure states of system-related constructs pertaining to a plasma processing system is disclosed. The technique includes receiving a set of indicia pertaining to a first system-related construct of said system-related constructs. The technique also includes computing, in accordance with a first sub-method and responsive to said receiving said first set of indicia, a first expected failure state value. The technique further includes computing a first normalized expected failure state value in accordance with a first weight; correlating said first normalized expected failure state value to a first color; and displaying said first color in a cell of an n-dimensional matrix, wherein n is a number greater than 2.</p> |
申请公布号 |
WO2006036893(A1) |
申请公布日期 |
2006.04.06 |
申请号 |
WO2005US34427 |
申请日期 |
2005.09.23 |
申请人 |
LAM RESEARCH CORPORATION;BAILEY, ANDREW D, III;YADAV, PUNEET |
发明人 |
BAILEY, ANDREW D, III;YADAV, PUNEET |
分类号 |
G06F11/30;G06F15/00;G21C17/00 |
主分类号 |
G06F11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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