ROLLING GUIDE DEVICE

摘要

A rolling guide device (160) has a raceway rail (161) as a railway member and has a mobile body (163) movably installed on the raceway rail (161) with balls (162) in between. A solid lubrication film by a closed magnetic field unbalanced magnetron sputtering device (CUMS device) is formed for the balls (162). The solid lubrication film has a low friction coefficient on the extreme surface of the film, is durable for repeated stress inside the film, and has high adhesion force. Such a solid lubrication film does not break from the inside or boundary of the film and wears away at a minimum speed from the surface of the film, and as a consequence, the film exhibits a highly reliable and ideal solid lubrication function. When the solid lubrication film with such improved adhesion ability and wear resistant characteristics is used for the rolling guide device, the device can be used in poor lubrication environment, high-temperature vacuum condition, and unusual environment such as oil-free use.