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发明名称
Verkleinerndes optisches Ringfeldsystem mit hoher numerischer Apertur
摘要
申请公布号
DE69635725(D1)
申请公布日期
2006.04.06
申请号
DE19966035725
申请日期
1996.11.18
申请人
ASML HOLDING, N.V.
发明人
WILLIAMSON, DAVID M.
分类号
G02B17/08;G02B17/06;G03F7/20;H01L21/027
主分类号
G02B17/08
代理机构
代理人
主权项
地址
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