| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal type flow sensor capable of reducing a noise caused by a turbulent flow, and reducing a measurement error caused by a temperature change, and its manufacturing method. <P>SOLUTION: This thermal type flow sensor 100 is formed by molding a flow rate detection chip 10, a circuit chip 20 and a lead 30 integrally by a molding material 50 so that a part of the flow rate detection chip 10 including a heater 13 is exposed to a fluid to be measured in the state where the flow rate detection chip 10 having a thin-walled part 12 where the heater is formed is loaded on a support 40. In the sensor 100, the support 40 is provided with a groove part 41 where the flow rate detection chip 10 is arranged and a communicating part 43 for communicating a cavity part 11 of the the flow rate detection chip 10 with the outside over the flow rate detection chip 10 in the arranged state, and a filling material 44 is injected into an aperture 42 formed between a groove part side surface and a flow rate detection chip side surface in the state where the flow rate detection chip 10 is arranged on the groove part 41 so that the flow rate detection chip surface becomes approximately flush with the support surface, to thereby block at least a part of the aperture 42. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
