| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a micro electron source device capable of fabricating a micro electron source device stably while maintaining the dispersibility of a carbon nanotube, and to provide a micro electron source device capable of increasing the lifetime by suppressing degradation in electron emission characteristics of the carbon nanotube, and a flat display device using the micro electron source device. <P>SOLUTION: The micro electron source device comprises: a cathode electrode 11, an insulating layer 13 and a gate electrode 14 that are stacked in this order on a substrate 10; an opening 15 formed in the gate electrode 14 and the insulating layer 13; and a micro electron source layer 12 formed at the bottom of the opening 15. The micro electron source layer 12 is formed by embedding a carbon nanotube 12a coated with an oxidation-resistant film in a conductive matrix 12b, and allowing an end of the carbon nanotube 12a to project from the matrix. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
