| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an ND filter which is excellent in neutrality in a visible area and is high in reliability and productivity. <P>SOLUTION: The ND filter 0 is a thin film type in which optical absorption films 3, 5 and dielectric films 2, 4, 6 are laminated on a transparent base 1. The transparent base 1 consists of films made of resin which can be fed at fixed speed. The optical absorption films 3, 5 consist of mixture of metal and metal compound filmed by spattering by targeting a simple substance of metal or mixture of metal and metal oxide and using mixed gas of oxygen, nitrogen and argon as atmospheric gas to the films traveling at the fixed speed and their extinction coefficients are≥0.3 in the visible area. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
