| 摘要 |
PROBLEM TO BE SOLVED: To provide a CVD (Chemical Vapor Deposition) coating method and a CVD coating device capable of improving the productivity of CVD coating to a work and further capable of solving the problem that traces caused by the support of a supporting member are left in the specified part of the work. SOLUTION: In a CVD furnace 4, a work supporting member 11 engaged with a part of the work W to be subjected to CVD coating and supporting the work in a suspending form within the CVD furnace is arranged. The work supporting member 11 is held by a connecting member 12 and a rotating shaft 13 so as to be rotatable to a horizontal direction, and, a rotary driving operation is intermittently given thereto by a rotary driving mechanism 16. During CVD treatment, a rotary driving operation is intermittently given to the rotating shaft 13 by the rotary driving mechanism 16, and the rotary operation is transmitted also to the work W via the work supporting member 11. In this way, the operation of centrifugal force acting on the work W is changed, the work W receives a swinging operation, and the contact position of the work supporting member 11 to the work W is changed. COPYRIGHT: (C)2006,JPO&NCIPI
|
