| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate reversing mechanism capable of shortening the moving stroke of facing another substrate independent of the size of a substrate to be upturned and facilitating the handling of the substrate, and to provide the device of manufacturing a display device. SOLUTION: The substrate reversing mechanism 20 has a dome-shaped vacuum chamber 21. A supporting part 22 supporting a back substrate 4, an electrostatic chuck 24 attracting and holding a front substrate 4, and a link arm 26 rotating the electrostatic chuck 24 are installed inside the vacuum chamber 21. The tip of the link arm 26 is connected to the center of the electrostatic chuck 24, and the base end of the link arm 26 and one end of the electrostatic chuck 24 are supported with slide shafts 25, 27 so as to be slidable in the lateral direction. COPYRIGHT: (C)2006,JPO&NCIPI
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