| 摘要 |
PROBLEM TO BE SOLVED: To simplify the production process of an optical disk stamper by enabling a ruggedness pattern corresponding to an optical disk format to be formed on a substrate having a center hole, and also to enable a desired ruggedness pattern to be formed even on a substrate having projections, a substrate having ruggedness and a substrate whose surface is not a plane, etc. SOLUTION: When forming a resist film on a substrate which is formed into disk shape, the resist film is formed by sputtering. After forming the latent image of the ruggedness pattern on the substrate and developing the latent image, etching is applied to the substrate directly by making the remaining resist pattern a mask and the resist is removed. Since the substrate after the removing of the resist becomes a stamper, the stamper is obtained without passing through redundant processes. The ruggedness pattern on the surface of a substrate is formed in the case where the substrate has ruggedness on the surface, in the case where the substrate has many holes on the surface, and also in the case where the surface of the substrate surges in the shape of a wave. COPYRIGHT: (C)2006,JPO&NCIPI
|
