发明名称 Hybrid orientation CMOS with partial insulation process
摘要 The present invention provides a method of integrated semiconductor devices such that different types of devices are formed upon a specific crystallographic orientation of a hybrid substrate. In accordance with the present invention, junction capacitance of one of the devices is improved in the present invention by forming the source/drain diffusion regions of the device in an epitiaxial semiconductor material such that they are situated on a buried insulating layer that extends partially underneath the body of the second semiconductor device. The second semiconductor device, together with the first semiconductor device, is both located atop the buried insulating layer. Unlike the first semiconductor device in which the body thereof is floating, the second semiconductor device is not floating. Rather, it is in contact with an underlying first semiconducting layer.
申请公布号 US2006073646(A1) 申请公布日期 2006.04.06
申请号 US20040958717 申请日期 2004.10.05
申请人 INTERNATONAL BUSINESS MACHINES CORPORATION 发明人 YANG MIN
分类号 H01L21/84;H01L21/20;H01L21/8238 主分类号 H01L21/84
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