| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a MEMS device including a small-size and low-cost internal switch responsive to acceleration/deceleration. <P>SOLUTION: The internal switch includes the MEMS device and has a movable electrode 124 supported on a base layer 112 of a wafer and a fixed electrode 122. The movable electrode 124 is moved in response to internal force due to acceleration and/or deceleration and put in contact with the fixed electrode 122 when the internal force reaches or exceeds a contact threshold value to change the internal switch from an opened condition into a shunted condition. The MEMS device is a substantially flat device. It is designed so that the internal force is applied in parallel to the device face almost similar to the other direction. The internal switch is designed into a relatively smaller size, smaller than 1 millimeter, and it is incorporated in a corresponding switch circuit. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
