| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To materialize a general-purpose logging mechanism by arbitrarily setting logging conditions. <P>SOLUTION: A combination of any device statuses is selected from respective items of a plurality of device status columns 311 to 315 and 321 to 325 (Tube Status, Trans Mode, Boat Mode, Step Name and Valve Number), whereby the logging conditions are set. When this takes place, logging start conditions (Start Trigger) 308 and logging end conditions (End Trigger) 309 can be set, respectively. The device status set from a display screen 300 is compared with the device status detected from an actual device for each predetermined time interval. When start conditions are established, a condition flag is erected. When end conditions are established in that state, the condition flag is dropped, thereby determining an establishment of the logging conditions according to the presence or absence of the condition flag. When TIME is selected in an accumulation system column (Accumulation Type) 327 to accumulate an established time, it is logging data. When MFCNo. is selected, an accumulated gas flow rate can be converted. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
