| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystal oscillator having a laminated structure, whereby the upper and lower crystal substrates can be integrally bonded with the upper and lower sides of a crystal substrate with a crystal oscillator chip and an outer frame formed integrally to them by means of anodic bonding. SOLUTION: Upper and lower crystal substrates 3, 4 having recessed parts 14, 15 for demarcating a cavity for containing the crystal vibration chip are laminated to facing sides, respectively, to an intermediate crystal substrate, of the upper and lower sides of the intermediate crystal substrate on which the crystal vibration chip 5 and the outer frame 6 are integrally formed. The upper and lower crystal substrates have doping layers 16, 17 formed by doping an alkali metal, such as aluminum to their bonding faces with the intermediate crystal substrate, and the bonding faces and the upper and lower faces of the outer frame of the intermediate crystal substrate formed with conductive films 9, 11 are bonded hermetically by anodic bonding. COPYRIGHT: (C)2006,JPO&NCIPI
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