| 摘要 |
PROBLEM TO BE SOLVED: To increase durability by reducing an amount of dust generated in a vacuum transfer device including a transporter having a surface to be guided, a transporting roller having a guiding surface, and a rolling bearing for rotably supporting the transporting roller. SOLUTION: The vacuum transfer device comprises a transporter 50, a transporting roller 60, a first rolling bearing 70, and a pair of second rolling bearings 80. a vanadium carbide film is formed by salt bathing on the surface (a surface 60A for guiding the transporter 50) of the transporting roller 60. A vanadium carbide film is formed by salt-bathing on the outer peripheral surface 80A (a surface for guiding the transporter 50) of an outer ring of the rolling bearing 80. Lubricating films formed of fluorooil is formed on orbits of the first and second rolling bearings 70 and 80. COPYRIGHT: (C)2006,JPO&NCIPI
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