| 摘要 |
PROBLEM TO BE SOLVED: To provide a membrane break detection device free from malfunction in detection caused by leakage of gas such as air and capable of highly accurately detecting a break in a membrane. SOLUTION: In the membrane break detection device 10 for detecting a break in the membrane by supplying a pressurized gas to a membrane filtering body 1, the device 10 performs a detection process of detecting air leakage from valves and piping by supplying the pressurized gas as a pre-process of the membrane break detection process, and performs membrane break detection process using the detection result of the air leakage. COPYRIGHT: (C)2006,JPO&NCIPI
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