| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating method in which the coating gap with good accuracy is gained while dispersion is suppressed without contacting the head top with a substrate, and to provide a coater for practising the coating method. SOLUTION: In the coating method of a coating solution discharged from the die head to the film substrate, the method comprises a step of measuring the discharge pressure, a step of setting the discharge pressure to the coating gap equivalent to the free discharge, a step of finding a reference point from the coating gap and a step of adjusting the coating gap based on the reference point of the coating gap. COPYRIGHT: (C)2006,JPO&NCIPI
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