发明名称 |
METHOD AND APPARATUS FOR INSPECTING A SPECIMEN SURFACE AND USE OF FLUORESCENT MATERIALS |
摘要 |
The invention relates to a method of inspecting a specimen surface. The method comprises the steps of generating a plurality of primary beams directed towards the specimen surface, focussing the plurality of primary beams onto respective loci on the specimen surface, collecting a plurality of secondary beams of charged particles originating from the specimen surface upon incidence of the primary beams, converting at least one of the collected secondary beams into an optical beam, and detecting the optical beam. |
申请公布号 |
WO2006009444(A3) |
申请公布日期 |
2006.04.06 |
申请号 |
WO2005NL00529 |
申请日期 |
2005.07.21 |
申请人 |
NSCHAPPELIJK ONDERZOEK TNO NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETE;NIJKERK, MICHIEL DAVID;KRUIT, PIETER |
发明人 |
NIJKERK, MICHIEL DAVID;KRUIT, PIETER |
分类号 |
G01N23/225;H01L21/66 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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