| 发明名称 |
Temporary protection of glass substrates comprises applying polymer protective layer at glass substrate and removing polymer protective layer by plasma etching procedure after fulfilling protective function of glass substrate |
| 摘要 |
<p>Method for temporary protection of glass substrates comprises applying at least a polymer protective layer at the glass substrate to be protected and removing the polymer protective layer by means of a plasma etching procedure after fulfilling the protective function of the glass substrate.</p> |
| 申请公布号 |
DE102004047800(A1) |
申请公布日期 |
2006.04.06 |
| 申请号 |
DE20041047800 |
申请日期 |
2004.09.29 |
| 申请人 |
SCHOTT AG |
发明人 |
WEBER, ANDREAS;KNOCHE, SILKE;LEIB, JUERGEN |
| 分类号 |
C03C17/32;C03C17/30;C07C23/00;H01L23/15;H01L31/0232 |
主分类号 |
C03C17/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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