| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a insulating insulator in which assured insulating condition is secured by cutting earth fault of a conductor containing an electrode, etc. generating a plasma to obtain stable operation, and further strength sufficient to cope with manufacture of a large scale substrate is secured while having small body, and also to provide a plasma treatment device provided with the insulator. <P>SOLUTION: The insulating insulator connected while preventing earth fault of the conductor by insulation comprises: an inner member 61 consisting of an insulating body directly connected to a rudder electrode 13; an outer member 62 so separately arranged as to cover the outer peripheral part of the inner member 61; and a spiral structure body 63 which is arranged between the inner member 61 and the outer member 62 and maintains the positional relation by contacting to both the member. The inner member 61 is constituted by providing a flow path F through which gas is made to flow to the inside thereof. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
