| 摘要 |
PROBLEM TO BE SOLVED: To provide a spindle seal device suppressing variation of a gap in a seal part. SOLUTION: This spindle seal device 1 has a static pressure gas bearing 15 arranged on a spindle device provided with a bearing 11 and a rotary spindle 13 rotatably supported relatively to a housing via the bearing 11, and can seal an inside of the spindle device 10 and atmospheric air side by pressure and flow of compressed air 30 blown out from the gas bearing. A metal ring member 31 having thermal expansion coefficient same as or proximate to the spindle 13 is fitted on an outer circumference side of the gas bearing 15. COPYRIGHT: (C)2006,JPO&NCIPI
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