| 摘要 |
PROBLEM TO BE SOLVED: To provide a parameter-detecting method of an object to be detected, capable of simply and accurately detecting the parameter of the detection object, and to provide a parameter detector. SOLUTION: A ratio (r) is calculated on the basis of the intensity of transmitted light, when the transmission axis direction of an analyzer 13 is inclined by an arbitrary angleω<SB>0</SB>, with respect to the incidence plane and the transmission axis direction of a polarizer 11 is inclined by 0°and 90°, with respect to the incidence plane. Further, the intensity of the transmitted light, when the transmission axis direction of the analyzer 13 is inclined by an arbitrary angleω, with respect to the incidence plane and the transmission axis direction of the polarizer 11 is inclined by an arbitrary angleαwith respect to the incidence plane, is detected with respect to a combination of at least two differentωandα. Then, the retardation or the thickness of a detection object 12 is calculated, on the basis of a plurality of the detected intensities of transmitted light and the ratio (r). COPYRIGHT: (C)2006,JPO&NCIPI
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