| 摘要 |
PROBLEM TO BE SOLVED: To provide a small heating device of high efficiency using superheated steam as a heat medium. SOLUTION: This heating device is composed of a superheating means 104 for superheating saturated steam flowing inside, by a heating element of hollow structure to produce superheated steam; a cooling means 107 of hollow structure for cooling with a refrigerant flowing inside; and a treating chamber 101 for leading in the superheated steam supplied from the superheating means 104, into the chamber to heat a heated object 102, and cooling the heated object 102 by the cooling means 107. The superheating means 104 and the cooling means 107 are arranged within the wall surface of the treating chamber 101 to integrate the treating chamber for generating superheated steam and heating the heated object, thus miniaturizing the device. Furthermore, since the treating chamber having a high temperature is cooled in a short time by the cooling means after heating is completed, a treating time can be shortened, and treating capacity can be maintained even if reducing the capacity of the treating chamber. Further miniaturization can thereby be attained, and recovery heat in cooling can be effectively utilized using a heat recovery apparatus such as a water heater to improve energy efficiency. COPYRIGHT: (C)2006,JPO&NCIPI
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