COMPOSITE MULTISTAGE DRY VACUUM PUMP HAVING ROOTS ROTORS AND SCREW ROTOR,申请号KR20040078423-传众专利搜索

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发明名称	COMPOSITE MULTISTAGE DRY VACUUM PUMP HAVING ROOTS ROTORS AND SCREW ROTOR
摘要
申请公布号	KR20060029465(A)	申请公布日期	2006.04.06
申请号	KR20040078423	申请日期	2004.10.01
申请人	LOT VACUUM CO., LTD.	发明人	LIM, MOON GI;LEE, SANG GIL
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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