| 摘要 |
<P>PROBLEM TO BE SOLVED: To machine a surface to be worked into a flat surface or a curved surface by keeping the polishing pressure as desired, stabilizing the polishing condition, restraining heterogeneous polishing result, and facilitating securing the shape accuracy and controlling the polishing conditions for securing the shape accuracy. <P>SOLUTION: This polishing device polishes a surface to be worked W1 of a workpiece W by applying polishing pressure to a polisher 3. The polishing device 1 has air chambers 5, 6 where a fluid flows. The polishing device 1 includes: a pressure converting means 7 for converting the fluid pressure of a fluid applied to the air chambers 5, 6 to pressing force serving as the polishing pressure to a spherical tool 3; a pressure control means 8 for freely controlling the fluid pressure of the fluid to arbitrary pressure; a pipe line 9 for introducing the fluid, the pressure of which is controlled by the pressure control means 8, into the pressure converting means 7; and a releasing means 10 for releasing the fluid to a space having lower pressure than the controlled pressure of the fluid in at least one or more out of the air chambers 5, 6 of the pressure converting means 7 or the downstream pipeline passing through the pressure converting means 7. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
