| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technology capable of detecting a position with a high resolution by forming a light shield part using a metallic film on each of light receiving elements at the same pitch as that of optical gratings provided to a main scale so as to decrease the pitch of the optical gratings up to a dimension limited by a minimum wire width and a minimum wire interval in the design rule of the metallic film used for a light shield film. <P>SOLUTION: Metallic wires 12 with the same patterns as the optical gratings are formed by arranging the light shield parts and metallic wire openings 19 at a pitch P on a p-well 10 functioning as a photodiode formed on an n-type substrate 20 opposed to the optical gratings at the pitch P arranged on the main scale. Further, contact parts 16 between the p-well 10 and the metallic wires 12 are provided to the light shield part. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
