| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe unit adjusting the position of conducting wires to electrodes using contact marks, even if the inspecting pads are not prepared in the specimen for each electrode, and also to provide an inspecting method and and a producing method of the probe unit. SOLUTION: The probe unit, which inspects the specimen equipped with electrodes and a padding for orientation positioned to the electrodes, is equipped with a substrate, conducting wires having a contact section formed on the substrate to contact with the electrode, and a mark generating section which is formed on the substrate and, by contacting with the padding for orientation in an area narrower than the contact section at the state where the contact section contacts with the electrodes, generates contact marks on the padding for orientation. COPYRIGHT: (C)2006,JPO&NCIPI
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